CATHODYNE
Optical cathodoluminescence
CATHODYNE
Cathodoluminescence is a spectroscopic method which allows the identification, on a local scale, of defects and impurities responsible for luminescence properties of a material bombarded by an electron gun. Fields of application are microelectronics, semiconducting, insulating materials, geology and mineralogy.
The hardware needed for dispositive Cathodyne
- Optical Microscope equipped with a camera (low level of light)
- A vacuum chamber containing motorized sample support
- Vacuum pump double level and accessoires
- Electron gun with cable
- Power supply controler monitored by PC – Port USB.
Cathodyne characteristics:
- Stability control of plasma 5kV à 20 kV and 50 to 400µA
- Automatic shooting
- Semi-quantitative measurements
- Quantitative measurements with spectrometer
- Extreme spatial resolution <1µm
- Optional : Heating and/or cooling
Left & right image : Cathodyne under optical microscope and motorized stage